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Thermal Conductivity of Nano-Crystallized Indium-Gallium-Zinc Oxide Thin Films Determined by Differential Three-Omega Method

The temperature dependence thermal conductivity of the indium-gallium-zinc oxide (IGZO) thin films was investigated with the differential three-omega method for the clear demonstration of nanocrystallinity. The thin films were deposited on an alumina (α-Al(2)O(3)) substrate by direct current (DC) ma...

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Detalles Bibliográficos
Autores principales: Khan, Rauf, Ohtaki, Michitaka, Hata, Satoshi, Miyazaki, Koji, Hattori, Reiji
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8230821/
https://www.ncbi.nlm.nih.gov/pubmed/34208185
http://dx.doi.org/10.3390/nano11061547