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Thermal Conductivity of Nano-Crystallized Indium-Gallium-Zinc Oxide Thin Films Determined by Differential Three-Omega Method
The temperature dependence thermal conductivity of the indium-gallium-zinc oxide (IGZO) thin films was investigated with the differential three-omega method for the clear demonstration of nanocrystallinity. The thin films were deposited on an alumina (α-Al(2)O(3)) substrate by direct current (DC) ma...
Autores principales: | Khan, Rauf, Ohtaki, Michitaka, Hata, Satoshi, Miyazaki, Koji, Hattori, Reiji |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8230821/ https://www.ncbi.nlm.nih.gov/pubmed/34208185 http://dx.doi.org/10.3390/nano11061547 |
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