Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure

An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms of physical, chemical, and biological sensing...

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Detalles Bibliográficos
Autores principales: Setiono, Andi, Fahrbach, Michael, Deutschinger, Alexander, Fantner, Ernest J., Schwalb, Christian H., Syamsu, Iqbal, Wasisto, Hutomo Suryo, Peiner, Erwin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8231909/
https://www.ncbi.nlm.nih.gov/pubmed/34198533
http://dx.doi.org/10.3390/s21124088

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8231909/
https://www.ncbi.nlm.nih.gov/pubmed/34198533
http://dx.doi.org/10.3390/s21124088

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