MEMS-Based Electrochemical Seismometer with a Sensing Unit Integrating Four Electrodes

This paper presents a new process to fabricate a sensing unit of electrochemical seismometers using only one silicon–glass–silicon bonded wafer. By integrating four electrodes on one silicon–glass–silicon bonded wafer, the consistency of the developed sensing unit was greatly improved, benefiting fr...

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Detalles Bibliográficos
Autores principales: Qi, Wenjie, Xu, Chao, Liu, Bowen, She, Xu, Liang, Tian, Chen, Deyong, Wang, Junbo, Chen, Jian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8232786/
https://www.ncbi.nlm.nih.gov/pubmed/34203906
http://dx.doi.org/10.3390/mi12060699

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8232786/
https://www.ncbi.nlm.nih.gov/pubmed/34203906
http://dx.doi.org/10.3390/mi12060699

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