Laser ablation of silicon with THz bursts of femtosecond pulses

In this work, we performed an experimental investigation supported by a theoretical analysis, to improve knowledge on the laser ablation of silicon with THz bursts of femtosecond laser pulses. Laser ablated craters have been created using 200 fs pulses at a wavelength of 1030 nm on silicon samples s...

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Detalles Bibliográficos
Autores principales: Gaudiuso, Caterina, Terekhin, Pavel N., Volpe, Annalisa, Nolte, Stefan, Rethfeld, Bärbel, Ancona, Antonio
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8233330/
https://www.ncbi.nlm.nih.gov/pubmed/34172786
http://dx.doi.org/10.1038/s41598-021-92645-7

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8233330/
https://www.ncbi.nlm.nih.gov/pubmed/34172786
http://dx.doi.org/10.1038/s41598-021-92645-7

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