Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors

An alignment-free sensing module for the positioning system based on tunneling magnetoresistive (TMR) sensors with an absolute-incremental-integrated scale is demonstrated. The sensors of the proposed system for both lines consist of identical layer stacks; therefore, all sensors can be fabricated i...

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Detalles Bibliográficos
Autores principales: Lee, Chia-Chang, Yen, Yu-Shen, Lai, Chih-Huang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8233855/
https://www.ncbi.nlm.nih.gov/pubmed/34208671
http://dx.doi.org/10.3390/s21124137

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8233855/
https://www.ncbi.nlm.nih.gov/pubmed/34208671
http://dx.doi.org/10.3390/s21124137

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