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Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors

An alignment-free sensing module for the positioning system based on tunneling magnetoresistive (TMR) sensors with an absolute-incremental-integrated scale is demonstrated. The sensors of the proposed system for both lines consist of identical layer stacks; therefore, all sensors can be fabricated i...

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Autores principales: Lee, Chia-Chang, Yen, Yu-Shen, Lai, Chih-Huang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8233855/
https://www.ncbi.nlm.nih.gov/pubmed/34208671
http://dx.doi.org/10.3390/s21124137
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author Lee, Chia-Chang
Yen, Yu-Shen
Lai, Chih-Huang
author_facet Lee, Chia-Chang
Yen, Yu-Shen
Lai, Chih-Huang
author_sort Lee, Chia-Chang
collection PubMed
description An alignment-free sensing module for the positioning system based on tunneling magnetoresistive (TMR) sensors with an absolute-incremental-integrated scale is demonstrated. The sensors of the proposed system for both lines consist of identical layer stacks; therefore, all sensors can be fabricated in identical processes from thin film deposition to device patterning on a single substrate. Consequently, the relative position of the sensors can be predefined at the lithography stage and the alignment error between sensors caused by the manual installation is completely eliminated. Different from the existing sensing scheme for incremental lines, we proposed to utilize the magnetic tunnel junctions with a perpendicular anisotropy reference layer and an in-plane anisotropy sensing layer. The sensors are placed parallel to the scale plane with magnetization of the sensing layer in the plane, which show the capability of polarity detection for the absolute line and reveal sinusoidal output signal for the incremental line. Furthermore, due to the large signal of TMR, the working distance can be further improved compared with conventional sensors. In addition, the cost of the positioning system is expected to be lowered, since all the sensors are fabricated in the same process without extra installation. Our design may pave a new avenue for the positioning system based on a magnetic detection scheme.
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spelling pubmed-82338552021-06-27 Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors Lee, Chia-Chang Yen, Yu-Shen Lai, Chih-Huang Sensors (Basel) Article An alignment-free sensing module for the positioning system based on tunneling magnetoresistive (TMR) sensors with an absolute-incremental-integrated scale is demonstrated. The sensors of the proposed system for both lines consist of identical layer stacks; therefore, all sensors can be fabricated in identical processes from thin film deposition to device patterning on a single substrate. Consequently, the relative position of the sensors can be predefined at the lithography stage and the alignment error between sensors caused by the manual installation is completely eliminated. Different from the existing sensing scheme for incremental lines, we proposed to utilize the magnetic tunnel junctions with a perpendicular anisotropy reference layer and an in-plane anisotropy sensing layer. The sensors are placed parallel to the scale plane with magnetization of the sensing layer in the plane, which show the capability of polarity detection for the absolute line and reveal sinusoidal output signal for the incremental line. Furthermore, due to the large signal of TMR, the working distance can be further improved compared with conventional sensors. In addition, the cost of the positioning system is expected to be lowered, since all the sensors are fabricated in the same process without extra installation. Our design may pave a new avenue for the positioning system based on a magnetic detection scheme. MDPI 2021-06-16 /pmc/articles/PMC8233855/ /pubmed/34208671 http://dx.doi.org/10.3390/s21124137 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Lee, Chia-Chang
Yen, Yu-Shen
Lai, Chih-Huang
Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors
title Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors
title_full Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors
title_fullStr Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors
title_full_unstemmed Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors
title_short Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors
title_sort alignment-free sensing module for absolute and incremental lines in linear positioning system based on tunneling-magnetoresistance sensors
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8233855/
https://www.ncbi.nlm.nih.gov/pubmed/34208671
http://dx.doi.org/10.3390/s21124137
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