Size Effects in Internal Friction of Nanocrystalline Aluminum Films

Al thin film is extensively used in micro-electromechanical systems (MEMS) and electronic interconnections; however, most previous research has concentrated on their quasi-static properties and applied their designs on larger scales. The present study designed a paddle-like cantilever specimen with...

Descripción completa

Detalles Bibliográficos
Autores principales: Dang, Nhat Minh, Wang, Zhao-Ying, Chou, Yun-Chia, Nguyen, Tra Anh Khoa, Dang, Thien Ngon, Lin, Ming-Tzer
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8233858/
https://www.ncbi.nlm.nih.gov/pubmed/34205366
http://dx.doi.org/10.3390/ma14123401

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8233858/
https://www.ncbi.nlm.nih.gov/pubmed/34205366
http://dx.doi.org/10.3390/ma14123401

Ejemplares similares