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A Schottky-Type Metal-Semiconductor-Metal Al(0.24)Ga(0.76)N UV Sensor Prepared by Using Selective Annealing
Asymmetric metal-semiconductor-metal (MSM) aluminum gallium nitride (AlGaN) UV sensors with 24% Al were fabricated using a selective annealing technique that dramatically reduced the dark current density and improved the ohmic behavior and performance compared to a non-annealed sensor. Its dark curr...
Autores principales: | Park, Byeong-Jun, Seol, Jeong-Hoon, Hahm, Sung-Ho |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8235189/ https://www.ncbi.nlm.nih.gov/pubmed/34205761 http://dx.doi.org/10.3390/s21124243 |
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