A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling o...

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Detalles Bibliográficos
Autores principales: Wang, JiuJiang, Liu, Xin, Yu, YuanYu, Li, Yao, Cheng, ChingHsiang, Zhang, Shuang, Mak, PengUn, Vai, MangI, Pun, SioHang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8235715/
https://www.ncbi.nlm.nih.gov/pubmed/34207176
http://dx.doi.org/10.3390/mi12060714