Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources

Foam targets are expected to be more efficient candidates than solid targets for laser produced plasma (LPP) for extreme ultraviolet (EUV) and X-ray radiation sources due to the expected plasma conditions that can be optimized regarding plasma opacities, volumetrics heating effects, and the produced...

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Detalles Bibliográficos
Autores principales: Wu, Yaoxing, Jain, Girik, Sizyuk, Tatyana, Wang, Xinbing, Hassanein, Ahmed
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8249381/
https://www.ncbi.nlm.nih.gov/pubmed/34211072
http://dx.doi.org/10.1038/s41598-021-93193-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8249381/
https://www.ncbi.nlm.nih.gov/pubmed/34211072
http://dx.doi.org/10.1038/s41598-021-93193-w

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