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Dynamics of laser produced plasma from foam targets for future nanolithography devices and X-ray sources
Foam targets are expected to be more efficient candidates than solid targets for laser produced plasma (LPP) for extreme ultraviolet (EUV) and X-ray radiation sources due to the expected plasma conditions that can be optimized regarding plasma opacities, volumetrics heating effects, and the produced...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8249381/ https://www.ncbi.nlm.nih.gov/pubmed/34211072 http://dx.doi.org/10.1038/s41598-021-93193-w |