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Influence of Deposition Method on the Structural and Optical Properties of Ge(2)Sb(2)Te(5)
Ge2Sb2Te5 (GST-225) is a chalcogenide material with applications in nonvolatile memories. However, chalcogenide material properties are dependent on the deposition technique. GST-225 thin films were prepared using three deposition methods: magnetron sputtering (MS), pulsed laser deposition (PLD) and...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8269865/ https://www.ncbi.nlm.nih.gov/pubmed/34209141 http://dx.doi.org/10.3390/ma14133663 |