Influence of Geometric Properties of Capacitive Sensors on Slope Error and Nonlinearity of Displacement Measurements

Capacitive sensors are widely used in industrial applications, such as CNC machine tools, where reliable positioning in the micrometer range with nanometer accuracy is required. Hence, these sensors are operated in harsh industrial environments. The accuracy of these sensors is mainly limited by slo...

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Detalles Bibliográficos
Autores principales: Daul, Lars, Jin, Tao, Busch, Ingo, Koenders, Ludger
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8271541/
https://www.ncbi.nlm.nih.gov/pubmed/34206437
http://dx.doi.org/10.3390/s21134270

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8271541/
https://www.ncbi.nlm.nih.gov/pubmed/34206437
http://dx.doi.org/10.3390/s21134270

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