Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor †

In this paper, small-sized acoustic horns, the sensitivity enhancement package for the MEMS-based thermal acoustic particle velocity sensor, have been designed and optimized. Four kinds of acoustic horns, including tube horn, double cone horn, double paradox horn, and exponential horn, were analyzed...

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Detalles Bibliográficos
Autores principales: Chang, Wenhan, Yang, Lingmeng, Zhu, Zhezheng, Yang, Zhenchuan, Hao, Yilong, Gao, Chengchen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8271838/
https://www.ncbi.nlm.nih.gov/pubmed/34202889
http://dx.doi.org/10.3390/s21134337

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8271838/
https://www.ncbi.nlm.nih.gov/pubmed/34202889
http://dx.doi.org/10.3390/s21134337

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