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Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor †
In this paper, small-sized acoustic horns, the sensitivity enhancement package for the MEMS-based thermal acoustic particle velocity sensor, have been designed and optimized. Four kinds of acoustic horns, including tube horn, double cone horn, double paradox horn, and exponential horn, were analyzed...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8271838/ https://www.ncbi.nlm.nih.gov/pubmed/34202889 http://dx.doi.org/10.3390/s21134337 |
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author | Chang, Wenhan Yang, Lingmeng Zhu, Zhezheng Yang, Zhenchuan Hao, Yilong Gao, Chengchen |
author_facet | Chang, Wenhan Yang, Lingmeng Zhu, Zhezheng Yang, Zhenchuan Hao, Yilong Gao, Chengchen |
author_sort | Chang, Wenhan |
collection | PubMed |
description | In this paper, small-sized acoustic horns, the sensitivity enhancement package for the MEMS-based thermal acoustic particle velocity sensor, have been designed and optimized. Four kinds of acoustic horns, including tube horn, double cone horn, double paradox horn, and exponential horn, were analyzed through numerical calculation. Considering both the amplification factor and effective length of amplification zone, a small-sized double cone horn with middle tube is designed and further optimized. A three-wire thermal acoustic particle velocity sensor was fabricated and packaged in the 3D printed double cone tube (DCT) horn. Experiment results show that an amplification factor of 6.63 at 600 Hz and 6.93 at 1 kHz was achieved. A good 8-shape directivity pattern was also obtained for the optimized DCT horn with the lateral inhibition ratio of 50.3 dB. No additional noise was introduced, demonstrating the DCT horn’s potential in improving the sensitivity of acoustic particle velocity sensors. |
format | Online Article Text |
id | pubmed-8271838 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-82718382021-07-11 Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor † Chang, Wenhan Yang, Lingmeng Zhu, Zhezheng Yang, Zhenchuan Hao, Yilong Gao, Chengchen Sensors (Basel) Article In this paper, small-sized acoustic horns, the sensitivity enhancement package for the MEMS-based thermal acoustic particle velocity sensor, have been designed and optimized. Four kinds of acoustic horns, including tube horn, double cone horn, double paradox horn, and exponential horn, were analyzed through numerical calculation. Considering both the amplification factor and effective length of amplification zone, a small-sized double cone horn with middle tube is designed and further optimized. A three-wire thermal acoustic particle velocity sensor was fabricated and packaged in the 3D printed double cone tube (DCT) horn. Experiment results show that an amplification factor of 6.63 at 600 Hz and 6.93 at 1 kHz was achieved. A good 8-shape directivity pattern was also obtained for the optimized DCT horn with the lateral inhibition ratio of 50.3 dB. No additional noise was introduced, demonstrating the DCT horn’s potential in improving the sensitivity of acoustic particle velocity sensors. MDPI 2021-06-24 /pmc/articles/PMC8271838/ /pubmed/34202889 http://dx.doi.org/10.3390/s21134337 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Chang, Wenhan Yang, Lingmeng Zhu, Zhezheng Yang, Zhenchuan Hao, Yilong Gao, Chengchen Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor † |
title | Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor † |
title_full | Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor † |
title_fullStr | Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor † |
title_full_unstemmed | Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor † |
title_short | Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor † |
title_sort | design and optimization of sensitivity enhancement package for mems-based thermal acoustic particle velocity sensor † |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8271838/ https://www.ncbi.nlm.nih.gov/pubmed/34202889 http://dx.doi.org/10.3390/s21134337 |
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