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Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor †

In this paper, small-sized acoustic horns, the sensitivity enhancement package for the MEMS-based thermal acoustic particle velocity sensor, have been designed and optimized. Four kinds of acoustic horns, including tube horn, double cone horn, double paradox horn, and exponential horn, were analyzed...

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Detalles Bibliográficos
Autores principales: Chang, Wenhan, Yang, Lingmeng, Zhu, Zhezheng, Yang, Zhenchuan, Hao, Yilong, Gao, Chengchen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8271838/
https://www.ncbi.nlm.nih.gov/pubmed/34202889
http://dx.doi.org/10.3390/s21134337
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author Chang, Wenhan
Yang, Lingmeng
Zhu, Zhezheng
Yang, Zhenchuan
Hao, Yilong
Gao, Chengchen
author_facet Chang, Wenhan
Yang, Lingmeng
Zhu, Zhezheng
Yang, Zhenchuan
Hao, Yilong
Gao, Chengchen
author_sort Chang, Wenhan
collection PubMed
description In this paper, small-sized acoustic horns, the sensitivity enhancement package for the MEMS-based thermal acoustic particle velocity sensor, have been designed and optimized. Four kinds of acoustic horns, including tube horn, double cone horn, double paradox horn, and exponential horn, were analyzed through numerical calculation. Considering both the amplification factor and effective length of amplification zone, a small-sized double cone horn with middle tube is designed and further optimized. A three-wire thermal acoustic particle velocity sensor was fabricated and packaged in the 3D printed double cone tube (DCT) horn. Experiment results show that an amplification factor of 6.63 at 600 Hz and 6.93 at 1 kHz was achieved. A good 8-shape directivity pattern was also obtained for the optimized DCT horn with the lateral inhibition ratio of 50.3 dB. No additional noise was introduced, demonstrating the DCT horn’s potential in improving the sensitivity of acoustic particle velocity sensors.
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spelling pubmed-82718382021-07-11 Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor † Chang, Wenhan Yang, Lingmeng Zhu, Zhezheng Yang, Zhenchuan Hao, Yilong Gao, Chengchen Sensors (Basel) Article In this paper, small-sized acoustic horns, the sensitivity enhancement package for the MEMS-based thermal acoustic particle velocity sensor, have been designed and optimized. Four kinds of acoustic horns, including tube horn, double cone horn, double paradox horn, and exponential horn, were analyzed through numerical calculation. Considering both the amplification factor and effective length of amplification zone, a small-sized double cone horn with middle tube is designed and further optimized. A three-wire thermal acoustic particle velocity sensor was fabricated and packaged in the 3D printed double cone tube (DCT) horn. Experiment results show that an amplification factor of 6.63 at 600 Hz and 6.93 at 1 kHz was achieved. A good 8-shape directivity pattern was also obtained for the optimized DCT horn with the lateral inhibition ratio of 50.3 dB. No additional noise was introduced, demonstrating the DCT horn’s potential in improving the sensitivity of acoustic particle velocity sensors. MDPI 2021-06-24 /pmc/articles/PMC8271838/ /pubmed/34202889 http://dx.doi.org/10.3390/s21134337 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Chang, Wenhan
Yang, Lingmeng
Zhu, Zhezheng
Yang, Zhenchuan
Hao, Yilong
Gao, Chengchen
Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor †
title Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor †
title_full Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor †
title_fullStr Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor †
title_full_unstemmed Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor †
title_short Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor †
title_sort design and optimization of sensitivity enhancement package for mems-based thermal acoustic particle velocity sensor †
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8271838/
https://www.ncbi.nlm.nih.gov/pubmed/34202889
http://dx.doi.org/10.3390/s21134337
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