Nanoscale Bilayer Mechanical Lithography Using Water as Developer

[Image: see text] Sustainability has become a critical concern in the semiconductor industry as hazardous wastes released during the manufacturing process of semiconductor devices have an adverse impact on human beings and the environment. The use of hazardous solvents in existing fabrication proces...

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Detalles Bibliográficos
Autores principales: Shu, Yu, Porter, Benjamin F., Soh, Eugene J. H., Farmakidis, Nikolaos, Lim, Seongdong, Lu, Yang, Warner, Jamie H., Bhaskaran, Harish
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2021
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8289280/
https://www.ncbi.nlm.nih.gov/pubmed/33886314
http://dx.doi.org/10.1021/acs.nanolett.1c00251

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8289280/
https://www.ncbi.nlm.nih.gov/pubmed/33886314
http://dx.doi.org/10.1021/acs.nanolett.1c00251

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