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Nanoscale Bilayer Mechanical Lithography Using Water as Developer
[Image: see text] Sustainability has become a critical concern in the semiconductor industry as hazardous wastes released during the manufacturing process of semiconductor devices have an adverse impact on human beings and the environment. The use of hazardous solvents in existing fabrication proces...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8289280/ https://www.ncbi.nlm.nih.gov/pubmed/33886314 http://dx.doi.org/10.1021/acs.nanolett.1c00251 |