Subsurface Deformation Mechanism in Nano-cutting of Gallium Arsenide Using Molecular Dynamics Simulation

During the nano-cutting process, monocrystalline gallium arsenide is faced with various surface/subsurface deformations and damages that significantly influence the product’s performance. In this paper, molecular dynamics simulations of nano-cutting on gallium arsenide are conducted to investigate t...

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Detalles Bibliográficos
Autores principales: Chen, Chenghao, Lai, Min, Fang, Fengzhou
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2021
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8290015/
https://www.ncbi.nlm.nih.gov/pubmed/34279731
http://dx.doi.org/10.1186/s11671-021-03574-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8290015/
https://www.ncbi.nlm.nih.gov/pubmed/34279731
http://dx.doi.org/10.1186/s11671-021-03574-3

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