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Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes

A hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical for the capacitance and sensitivity of a hemispheri...

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Detalles Bibliográficos
Autores principales: Wang, Renxin, Bai, Bing, Zhang, Wendong, Cao, Huiliang, Liu, Jun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8303168/
https://www.ncbi.nlm.nih.gov/pubmed/34357225
http://dx.doi.org/10.3390/mi12070815