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Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes
A hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical for the capacitance and sensitivity of a hemispheri...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8303168/ https://www.ncbi.nlm.nih.gov/pubmed/34357225 http://dx.doi.org/10.3390/mi12070815 |