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Properties of Metallic and Oxide Thin Films Based on Ti and Co Prepared by Magnetron Sputtering from Sintered Targets with Different Co-Content

In this work, selected properties of metallic and oxide thin films based on titanium and cobalt were described. Thin-film coatings were prepared using the magnetron sputtering method. The deposition was carried out from sintered targets with different Co-content (2 at.%, 12 at.% and 50 at.%). The re...

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Detalles Bibliográficos
Autores principales: Wojcieszak, Damian, Mazur, Michał, Pokora, Patrycja, Wrona, Adriana, Bilewska, Katarzyna, Kijaszek, Wojciech, Kotwica, Tomasz, Posadowski, Witold, Domaradzki, Jarosław
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8304873/
https://www.ncbi.nlm.nih.gov/pubmed/34300716
http://dx.doi.org/10.3390/ma14143797