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Properties of Metallic and Oxide Thin Films Based on Ti and Co Prepared by Magnetron Sputtering from Sintered Targets with Different Co-Content
In this work, selected properties of metallic and oxide thin films based on titanium and cobalt were described. Thin-film coatings were prepared using the magnetron sputtering method. The deposition was carried out from sintered targets with different Co-content (2 at.%, 12 at.% and 50 at.%). The re...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8304873/ https://www.ncbi.nlm.nih.gov/pubmed/34300716 http://dx.doi.org/10.3390/ma14143797 |
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author | Wojcieszak, Damian Mazur, Michał Pokora, Patrycja Wrona, Adriana Bilewska, Katarzyna Kijaszek, Wojciech Kotwica, Tomasz Posadowski, Witold Domaradzki, Jarosław |
author_facet | Wojcieszak, Damian Mazur, Michał Pokora, Patrycja Wrona, Adriana Bilewska, Katarzyna Kijaszek, Wojciech Kotwica, Tomasz Posadowski, Witold Domaradzki, Jarosław |
author_sort | Wojcieszak, Damian |
collection | PubMed |
description | In this work, selected properties of metallic and oxide thin films based on titanium and cobalt were described. Thin-film coatings were prepared using the magnetron sputtering method. The deposition was carried out from sintered targets with different Co-content (2 at.%, 12 at.% and 50 at.%). The relation between the Ti–Co target composition and the Co-content in the metallic and oxide films was examined. There was 15–20% more cobalt in the films than in the target. Moreover, the deposition rate under neutral conditions (in Ar plasma) was even 10-times higher compared to oxidizing Ar:O(2) (70:30) plasma. A comprehensive analysis of the structural properties (performed with GIXRD and SEM) revealed the amorphous nature of (Ti,Co)Ox coatings, regardless of the cobalt content in the coating. The fine-grained, homogenous microstructure was observed, where cracks and voids were identified only for films with high Co-content. Optical studies have shown that these films were well transparent (60% ÷ 80%), and the amount of cobalt in the target from which they were sputtered had a significant impact on the decrease in the transparency level, the slight shift of the absorption edge position (from 279 nm to 289 nm) as well as the decrease in their optical band gap energy (from 3.13 eV to 1.71 eV). Electrical studies have shown that in (Ti,Co)Ox thin films, a unipolar memristive-like effect can be observed. The occurrence of such effects has not been reported so far in the case of TiO(2) coatings with the addition of Co. |
format | Online Article Text |
id | pubmed-8304873 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-83048732021-07-25 Properties of Metallic and Oxide Thin Films Based on Ti and Co Prepared by Magnetron Sputtering from Sintered Targets with Different Co-Content Wojcieszak, Damian Mazur, Michał Pokora, Patrycja Wrona, Adriana Bilewska, Katarzyna Kijaszek, Wojciech Kotwica, Tomasz Posadowski, Witold Domaradzki, Jarosław Materials (Basel) Article In this work, selected properties of metallic and oxide thin films based on titanium and cobalt were described. Thin-film coatings were prepared using the magnetron sputtering method. The deposition was carried out from sintered targets with different Co-content (2 at.%, 12 at.% and 50 at.%). The relation between the Ti–Co target composition and the Co-content in the metallic and oxide films was examined. There was 15–20% more cobalt in the films than in the target. Moreover, the deposition rate under neutral conditions (in Ar plasma) was even 10-times higher compared to oxidizing Ar:O(2) (70:30) plasma. A comprehensive analysis of the structural properties (performed with GIXRD and SEM) revealed the amorphous nature of (Ti,Co)Ox coatings, regardless of the cobalt content in the coating. The fine-grained, homogenous microstructure was observed, where cracks and voids were identified only for films with high Co-content. Optical studies have shown that these films were well transparent (60% ÷ 80%), and the amount of cobalt in the target from which they were sputtered had a significant impact on the decrease in the transparency level, the slight shift of the absorption edge position (from 279 nm to 289 nm) as well as the decrease in their optical band gap energy (from 3.13 eV to 1.71 eV). Electrical studies have shown that in (Ti,Co)Ox thin films, a unipolar memristive-like effect can be observed. The occurrence of such effects has not been reported so far in the case of TiO(2) coatings with the addition of Co. MDPI 2021-07-07 /pmc/articles/PMC8304873/ /pubmed/34300716 http://dx.doi.org/10.3390/ma14143797 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Wojcieszak, Damian Mazur, Michał Pokora, Patrycja Wrona, Adriana Bilewska, Katarzyna Kijaszek, Wojciech Kotwica, Tomasz Posadowski, Witold Domaradzki, Jarosław Properties of Metallic and Oxide Thin Films Based on Ti and Co Prepared by Magnetron Sputtering from Sintered Targets with Different Co-Content |
title | Properties of Metallic and Oxide Thin Films Based on Ti and Co Prepared by Magnetron Sputtering from Sintered Targets with Different Co-Content |
title_full | Properties of Metallic and Oxide Thin Films Based on Ti and Co Prepared by Magnetron Sputtering from Sintered Targets with Different Co-Content |
title_fullStr | Properties of Metallic and Oxide Thin Films Based on Ti and Co Prepared by Magnetron Sputtering from Sintered Targets with Different Co-Content |
title_full_unstemmed | Properties of Metallic and Oxide Thin Films Based on Ti and Co Prepared by Magnetron Sputtering from Sintered Targets with Different Co-Content |
title_short | Properties of Metallic and Oxide Thin Films Based on Ti and Co Prepared by Magnetron Sputtering from Sintered Targets with Different Co-Content |
title_sort | properties of metallic and oxide thin films based on ti and co prepared by magnetron sputtering from sintered targets with different co-content |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8304873/ https://www.ncbi.nlm.nih.gov/pubmed/34300716 http://dx.doi.org/10.3390/ma14143797 |
work_keys_str_mv | AT wojcieszakdamian propertiesofmetallicandoxidethinfilmsbasedontiandcopreparedbymagnetronsputteringfromsinteredtargetswithdifferentcocontent AT mazurmichał propertiesofmetallicandoxidethinfilmsbasedontiandcopreparedbymagnetronsputteringfromsinteredtargetswithdifferentcocontent AT pokorapatrycja propertiesofmetallicandoxidethinfilmsbasedontiandcopreparedbymagnetronsputteringfromsinteredtargetswithdifferentcocontent AT wronaadriana propertiesofmetallicandoxidethinfilmsbasedontiandcopreparedbymagnetronsputteringfromsinteredtargetswithdifferentcocontent AT bilewskakatarzyna propertiesofmetallicandoxidethinfilmsbasedontiandcopreparedbymagnetronsputteringfromsinteredtargetswithdifferentcocontent AT kijaszekwojciech propertiesofmetallicandoxidethinfilmsbasedontiandcopreparedbymagnetronsputteringfromsinteredtargetswithdifferentcocontent AT kotwicatomasz propertiesofmetallicandoxidethinfilmsbasedontiandcopreparedbymagnetronsputteringfromsinteredtargetswithdifferentcocontent AT posadowskiwitold propertiesofmetallicandoxidethinfilmsbasedontiandcopreparedbymagnetronsputteringfromsinteredtargetswithdifferentcocontent AT domaradzkijarosław propertiesofmetallicandoxidethinfilmsbasedontiandcopreparedbymagnetronsputteringfromsinteredtargetswithdifferentcocontent |