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Characteristics of Plasma Flow for Microwave Plasma Assisted Aerosol Deposition

To validate the possibility of the developed microwave plasma source with a novel structure for plasma aerosol deposition, the characteristics of the plasma flow velocity generated from the microwave plasma source were investigated by a Mach probe with pressure variation. Simulation with the turbule...

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Detalles Bibliográficos
Autores principales: Kang, In-Je, Cho, Chang-Hyun, Chang, Hyonu, Jang, Soo-Ouk, Park, Hyun-Jae, Kim, Dae-Gun, Lee, Kyung-Min, Kim, Ji-Hun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8305430/
https://www.ncbi.nlm.nih.gov/pubmed/34209503
http://dx.doi.org/10.3390/nano11071705