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Characteristics of Plasma Flow for Microwave Plasma Assisted Aerosol Deposition
To validate the possibility of the developed microwave plasma source with a novel structure for plasma aerosol deposition, the characteristics of the plasma flow velocity generated from the microwave plasma source were investigated by a Mach probe with pressure variation. Simulation with the turbule...
Autores principales: | Kang, In-Je, Cho, Chang-Hyun, Chang, Hyonu, Jang, Soo-Ouk, Park, Hyun-Jae, Kim, Dae-Gun, Lee, Kyung-Min, Kim, Ji-Hun |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8305430/ https://www.ncbi.nlm.nih.gov/pubmed/34209503 http://dx.doi.org/10.3390/nano11071705 |
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