Analysis of Distortion Based on 2D MEMS Micromirror Scanning Projection System

To analyze the distortion problem of two-dimensional micro-electromechanical system (MEMS) micromirror in-plane scanning, this paper makes a full theoretical analysis of the distortion causes from many aspects. Firstly, the mathematical relations among the deflection angle, laser incidence angle, an...

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Detalles Bibliográficos
Autores principales: Wang, Xichen, Xie, Yingke, Liang, Hengheng, Zhong, Nianbing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8306571/
https://www.ncbi.nlm.nih.gov/pubmed/34357228
http://dx.doi.org/10.3390/mi12070818

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8306571/
https://www.ncbi.nlm.nih.gov/pubmed/34357228
http://dx.doi.org/10.3390/mi12070818

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