Fabrication and Characterization of Nanonet-Channel LTPS TFTs Using a Nanosphere-Assisted Patterning Technique

We present the fabrication and electrical characteristics of nanonet-channel (NET) low-temperature polysilicon channel (LTPS) thin-film transistors (TFTs) using a nanosphere-assisted patterning (NAP) technique. The NAP technique is introduced to form a nanonet-channel instead of the electron beam li...

Descripción completa

Detalles Bibliográficos
Autores principales: Yoon, Gilsang, Kim, Donghoon, Park, Iksoo, Jin, Bo, Lee, Jeong-Soo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8307430/
https://www.ncbi.nlm.nih.gov/pubmed/34202547
http://dx.doi.org/10.3390/mi12070741

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8307430/
https://www.ncbi.nlm.nih.gov/pubmed/34202547
http://dx.doi.org/10.3390/mi12070741

Ejemplares similares