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Fabrication and Characterization of Nanonet-Channel LTPS TFTs Using a Nanosphere-Assisted Patterning Technique

We present the fabrication and electrical characteristics of nanonet-channel (NET) low-temperature polysilicon channel (LTPS) thin-film transistors (TFTs) using a nanosphere-assisted patterning (NAP) technique. The NAP technique is introduced to form a nanonet-channel instead of the electron beam li...

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Detalles Bibliográficos
Autores principales:	Yoon, Gilsang, Kim, Donghoon, Park, Iksoo, Jin, Bo, Lee, Jeong-Soo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8307430/ https://www.ncbi.nlm.nih.gov/pubmed/34202547 http://dx.doi.org/10.3390/mi12070741

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