Structural Properties of Thin ZnO Films Deposited by ALD under O-Rich and Zn-Rich Growth Conditions and Their Relationship with Electrical Parameters

The structural, optical, and electrical properties of ZnO are intimately intertwined. In the present work, the structural and transport properties of 100 nm thick polycrystalline ZnO films obtained by atomic layer deposition (ALD) at a growth temperature (T(g)) of 100–300 °C were investigated. The e...

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Detalles Bibliográficos
Autores principales: Mishra, Sushma, Przezdziecka, Ewa, Wozniak, Wojciech, Adhikari, Abinash, Jakiela, Rafal, Paszkowicz, Wojciech, Sulich, Adrian, Ozga, Monika, Kopalko, Krzysztof, Guziewicz, Elzbieta
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8307850/
https://www.ncbi.nlm.nih.gov/pubmed/34300967
http://dx.doi.org/10.3390/ma14144048

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8307850/
https://www.ncbi.nlm.nih.gov/pubmed/34300967
http://dx.doi.org/10.3390/ma14144048

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