Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim

A large-area and ultrathin MEMS (microelectromechanical system) mirror can provide efficient light-coupling, a large scanning area, and high energy efficiency for actuation. However, the ultrathin mirror is significantly vulnerable to diverse film deformation due to residual thin film stresses, so t...

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Detalles Bibliográficos
Autores principales: Ahn, Myeong-Su, Jeon, Jaehun, Jang, Kyung-Won, Jeong, Ki-Hun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8308042/
https://www.ncbi.nlm.nih.gov/pubmed/34206955
http://dx.doi.org/10.3390/mi12070754

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8308042/
https://www.ncbi.nlm.nih.gov/pubmed/34206955
http://dx.doi.org/10.3390/mi12070754

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