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Analysis of Nanoscratch Mechanism of C-Plane Sapphire with the Aid of Molecular Dynamics Simulation of Hcp Crystal

In this study, single groove nanoscratch experiments using a friction force microscope (FFM) with a monocrystalline diamond tip were conducted on a c-plane sapphire wafer to analyze the ductile-regime removal and deformation mechanism including the anisotropy. Various characteristics, such as scratc...

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Detalles Bibliográficos
Autores principales: Lin, Wangpiao, Yano, Naohiko, Shimizu, Jun, Zhou, Libo, Onuki, Teppei, Ojima, Hirotaka
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8308124/
https://www.ncbi.nlm.nih.gov/pubmed/34361124
http://dx.doi.org/10.3390/nano11071739