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Toward Enhanced Humidity Stability of Triboelectric Mechanical Sensors via Atomic Layer Deposition
Humid conditions can disrupt the triboelectric signal generation and reduce the accuracy of triboelectric mechanical sensors. This study demonstrates a novel design approach using atomic layer deposition (ALD) to enhance the humidity resistance of triboelectric mechanical sensors. Titanium oxide (Ti...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8308376/ https://www.ncbi.nlm.nih.gov/pubmed/34361180 http://dx.doi.org/10.3390/nano11071795 |