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Toward Enhanced Humidity Stability of Triboelectric Mechanical Sensors via Atomic Layer Deposition

Humid conditions can disrupt the triboelectric signal generation and reduce the accuracy of triboelectric mechanical sensors. This study demonstrates a novel design approach using atomic layer deposition (ALD) to enhance the humidity resistance of triboelectric mechanical sensors. Titanium oxide (Ti...

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Detalles Bibliográficos
Autores principales:	Kim, Wook, Yasmeen, Sumaira, Nguyen, Chi Thang, Lee, Han-Bo-Ram, Choi, Dukhyun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8308376/ https://www.ncbi.nlm.nih.gov/pubmed/34361180 http://dx.doi.org/10.3390/nano11071795

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