Cargando…

Tin deposition on ruthenium and its influence on blistering in multi-layer mirrors

An atomistic description of tin deposition on ruthenium and its effect on blistering damage is of great interest in extreme ultraviolet (EUV) lithography. In EUV machines, tin debris from the EUV-emitting tin plasma may be deposited on the mirrors in the optical path. Tin facilitates the formation o...

Descripción completa

Detalles Bibliográficos
Autores principales:	Onwudinanti, Chidozie, Brocks, Geert, Koelman, Vianney, Morgan, Thomas, Tao, Shuxia
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	The Royal Society of Chemistry 2021
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8323739/ https://www.ncbi.nlm.nih.gov/pubmed/34114582 http://dx.doi.org/10.1039/d1cp01082d

Ejemplares similares

A ReaxFF Molecular Dynamics Study of Hydrogen Diffusion in Ruthenium–The Role of Grain Boundaries
por: Onwudinanti, Chidozie, et al.
Publicado: (2022)

Tin, The Enabler—Hydrogen Diffusion into Ruthenium
por: Onwudinanti, Chidozie, et al.
Publicado: (2019)

Stabilizing Lead-Free All-Inorganic Tin Halide Perovskites by Ion Exchange
por: Jiang, Junke, et al.
Publicado: (2018)

Atomic layer deposition of superparamagnetic ruthenium-doped iron oxide thin film
por: Tamm, Aile, et al.
Publicado: (2021)

Absolute energy level positions in tin- and lead-based halide perovskites
por: Tao, Shuxia, et al.
Publicado: (2019)

In Situ IR Spectroscopy Studies of Atomic Layer-Deposited SnO(2) on Formamidinium-Based Lead Halide Perovskite
por: Bracesco, Andrea E. A., et al.
Publicado: (2023)

The role of sodium in stabilizing tin–lead (Sn–Pb) alloyed perovskite quantum dots
por: Jiang, Junke, et al.
Publicado: (2021)

Overall reaction mechanism for a full atomic layer deposition cycle of W films on TiN surfaces: first-principles study
por: Park, Hwanyeol, et al.
Publicado: (2018)

Properties of tin oxide films grown by atomic layer deposition from tin tetraiodide and ozone
por: Kalam, Kristjan, et al.
Publicado: (2023)

Effects of H(2) and N(2) treatment for B(2)H(6) dosing process on TiN surfaces during atomic layer deposition: an ab initio study
por: Park, Hwanyeol, et al.
Publicado: (2018)

Topotactic anion-exchange in thermoelectric nanostructured layered tin chalcogenides with reduced selenium content
por: Han, Guang, et al.
Publicado: (2018)

Acid-durable electride with layered ruthenium for ammonia synthesis: boosting the activity via selective etching
por: Li, Jiang, et al.
Publicado: (2019)

Mechanical and Magnetic Properties of Double Layered Nanostructures of Tin and Zirconium Oxides Grown by Atomic Layer Deposition
por: Tamm, Aile, et al.
Publicado: (2021)

Li-based layered nickel–tin oxide obtained through electrochemically-driven cation exchange
por: Morozov, Anatolii V., et al.
Publicado: (2021)

Unified theory for light-induced halide segregation in mixed halide perovskites
por: Chen, Zehua, et al.
Publicado: (2021)

A low-crystalline ruthenium nano-layer supported on praseodymium oxide as an active catalyst for ammonia synthesis
por: Sato, Katsutoshi, et al.
Publicado: (2017)

Aqueous synthesis of tin- and indium-doped WO(3) films via evaporation-driven deposition and their electrochromic properties
por: Uchiyama, Hiroaki, et al.
Publicado: (2021)

Polyelectrolyte layer-by-layer deposition on nanoporous supports for ion selective membranes
por: Percival, Stephen J., et al.
Publicado: (2018)

Blisters on graphite surface: a scanning microwave microscopy investigation
por: Pavoni, Eleonora, et al.
Publicado: (2019)

Enabling water-free PEDOT as hole selective layer in lead-free tin perovskite solar cells
por: Di Girolamo, Diego, et al.
Publicado: (2022)

Characterization and study of high conductivity antimony-doped tin oxide thin films grown by mist chemical vapor deposition
por: Liu, Li, et al.
Publicado: (2023)

On the formation of blisters in annealed hydrogenated a-Si layers
por: Serényi, Miklós, et al.
Publicado: (2013)

Multidimensional assembly using layer-by-layer deposition for synchronized cardiac macro tissues
por: Jang, Yongjun, et al.
Publicado: (2020)

Decomposition of Organic Perovskite Precursors on MoO(3): Role of Halogen and Surface Defects
por: Apergi, Sofia, et al.
Publicado: (2022)

Compound Defects in Halide Perovskites: A First-Principles Study of CsPbI(3)
por: Xue, Haibo, et al.
Publicado: (2023)

Efficient perovskite light-emitting diodes based on a solution-processed tin dioxide electron transport layer
por: Wang, Heyong, et al.
Publicado: (2018)

Performance enhancement of single layer organic light-emitting diodes using chlorinated indium tin oxide as the anode
por: Wu, Zhenxuan, et al.
Publicado: (2018)

Tin–zinc-oxide nanocomposites (SZO) as promising electron transport layers for efficient and stable perovskite solar cells
por: Shalan, Ahmed E., et al.
Publicado: (2019)

Viscous fingering instabilities in spontaneously formed blisters of MoS(2) multilayers
por: Pandey, Mukesh, et al.
Publicado: (2023)

Hydrolytic dehydrogenation of NH(3)BH(3) catalyzed by ruthenium nanoparticles supported on magnesium–aluminum layered double-hydroxides
por: Qiu, Xueying, et al.
Publicado: (2020)

Correction: Multidimensional assembly using layer-by-layer deposition for synchronized cardiac macro tissues
por: Jang, Yongjun, et al.
Publicado: (2020)

Thermodynamic Origin of the Photostability of the Two-Dimensional Perovskite PEA(2)Pb(I(1–x)Br(x))(4)
por: Chen, Zehua, et al.
Publicado: (2023)

AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
por: Kao, Wei-Chung, et al.
Publicado: (2019)

Colloidal quantum dot light-emitting diodes employing solution-processable tin dioxide nanoparticles in an electron transport layer
por: Park, Myeongjin, et al.
Publicado: (2020)

Tin and Tin Compound Materials as Anodes in Lithium-Ion and Sodium-Ion Batteries: A Review
por: Mou, Haoyi, et al.
Publicado: (2020)

The influence of Bacillus subtilis on tin-coated copper in an aqueous environment
por: Xiong, Ruilin, et al.
Publicado: (2018)

Patterning order and disorder with an angle: modeling single-layer dual-phase nematic elastomer ribbons
por: Gimenez-Pinto, Vianney, et al.
Publicado: (2019)

HfS(2) thin films deposited at room temperature by an emerging technique, solution atomic layer deposition
por: Cao, Yuanyuan, et al.
Publicado: (2021)

A platinum–ruthenium hybrid prodrug with multi-enzymatic activities for chemo-catalytic therapy of hypoxic tumors
por: Yang, Gang-Gang, et al.
Publicado: (2022)

A controlled nucleation and growth of Si nanowires by using a TiN diffusion barrier layer for lithium-ion batteries
por: Kim, Dongheun, et al.
Publicado: (2022)

Cannot write session to /tmp/vufind_sessions/sess_b2c1b7sd9r2b0kcq9cp3madhft