Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays

Silicon nanowire field-effect transistors (SiNW-FET) have been studied as ultra-high sensitive sensors for the detection of biomolecules, metal ions, gas molecules and as an interface for biological systems due to their remarkable electronic properties. “Bottom-up” or “top-down” approaches that are...

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Detalles Bibliográficos
Autores principales: Tintelott, Marcel, Pachauri, Vivek, Ingebrandt, Sven, Vu, Xuan Thang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8347659/
https://www.ncbi.nlm.nih.gov/pubmed/34372390
http://dx.doi.org/10.3390/s21155153

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8347659/
https://www.ncbi.nlm.nih.gov/pubmed/34372390
http://dx.doi.org/10.3390/s21155153

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