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Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays
Silicon nanowire field-effect transistors (SiNW-FET) have been studied as ultra-high sensitive sensors for the detection of biomolecules, metal ions, gas molecules and as an interface for biological systems due to their remarkable electronic properties. “Bottom-up” or “top-down” approaches that are...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8347659/ https://www.ncbi.nlm.nih.gov/pubmed/34372390 http://dx.doi.org/10.3390/s21155153 |