A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field

In this study, an accurate analytic semi-linear elliptic differential model for a circular membrane MEMS device, which considers the effect of the fringing field on the membrane curvature recovering, is presented. A novel algebraic condition, related to the membrane electromechanical properties, abl...

Descripción completa

Detalles Bibliográficos
Autores principales: Versaci, Mario, Jannelli, Alessandra, Morabito, Francesco Carlo, Angiulli, Giovanni
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8348402/
https://www.ncbi.nlm.nih.gov/pubmed/34372474
http://dx.doi.org/10.3390/s21155237

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8348402/
https://www.ncbi.nlm.nih.gov/pubmed/34372474
http://dx.doi.org/10.3390/s21155237

Ejemplares similares