Rapid Prototyping of Inertial MEMS Devices through Structural Optimization

In this paper, we propose a novel design and optimization environment for inertial MEMS devices based on a computationally efficient schematization of the structure at the a device level. This allows us to obtain a flexible and efficient design optimization tool, particularly useful for rapid device...

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Detalles Bibliográficos
Autores principales: Giannini, Daniele, Bonaccorsi, Giacomo, Braghin, Francesco
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8348519/
https://www.ncbi.nlm.nih.gov/pubmed/34372301
http://dx.doi.org/10.3390/s21155064

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8348519/
https://www.ncbi.nlm.nih.gov/pubmed/34372301
http://dx.doi.org/10.3390/s21155064

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