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Rapid Prototyping of Inertial MEMS Devices through Structural Optimization
In this paper, we propose a novel design and optimization environment for inertial MEMS devices based on a computationally efficient schematization of the structure at the a device level. This allows us to obtain a flexible and efficient design optimization tool, particularly useful for rapid device...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8348519/ https://www.ncbi.nlm.nih.gov/pubmed/34372301 http://dx.doi.org/10.3390/s21155064 |