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Control of Competing Thermodynamics and Kinetics in Vapor Phase Thin-Film Growth of Nitrides and Borides

Thin-film  growth is a platform technique that allows the preparation of various undeveloped materials and enables the development of novel energy generation devices. Preferred phase formation, control of crystalline orientation and quality, defect concentration, and stoichiometry in thin films are...

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Detalles Bibliográficos
Autores principales: Ohkubo, Isao, Aizawa, Takashi, Nakamura, Katsumitsu, Mori, Takao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Frontiers Media S.A. 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8353106/
https://www.ncbi.nlm.nih.gov/pubmed/34386477
http://dx.doi.org/10.3389/fchem.2021.642388