Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance

Micro-Electro-Mechanical Systems revolutionized the consumer market for their small dimensions, high performances and low costs. In recent years, the evolution of the Internet of Things is posing new challenges to MEMS designers that have to deal with complex multiphysics systems experiencing highly...

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Detalles Bibliográficos
Autores principales: Gobat, Giorgio, Zega, Valentina, Fedeli, Patrick, Guerinoni, Luca, Touzé, Cyril, Frangi, Attilio
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8361070/
https://www.ncbi.nlm.nih.gov/pubmed/34385510
http://dx.doi.org/10.1038/s41598-021-95793-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8361070/
https://www.ncbi.nlm.nih.gov/pubmed/34385510
http://dx.doi.org/10.1038/s41598-021-95793-y

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