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Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance
Micro-Electro-Mechanical Systems revolutionized the consumer market for their small dimensions, high performances and low costs. In recent years, the evolution of the Internet of Things is posing new challenges to MEMS designers that have to deal with complex multiphysics systems experiencing highly...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8361070/ https://www.ncbi.nlm.nih.gov/pubmed/34385510 http://dx.doi.org/10.1038/s41598-021-95793-y |
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author | Gobat, Giorgio Zega, Valentina Fedeli, Patrick Guerinoni, Luca Touzé, Cyril Frangi, Attilio |
author_facet | Gobat, Giorgio Zega, Valentina Fedeli, Patrick Guerinoni, Luca Touzé, Cyril Frangi, Attilio |
author_sort | Gobat, Giorgio |
collection | PubMed |
description | Micro-Electro-Mechanical Systems revolutionized the consumer market for their small dimensions, high performances and low costs. In recent years, the evolution of the Internet of Things is posing new challenges to MEMS designers that have to deal with complex multiphysics systems experiencing highly nonlinear dynamic responses. To be able to simulate a priori and in real-time the behavior of such systems it is thus becoming mandatory to understand the sources of nonlinearities and avoid them when harmful or exploit them for the design of innovative devices. In this work, we present the first numerical tool able to estimate a priori and in real-time the complex nonlinear responses of MEMS devices without resorting to simplified theories. Moreover, the proposed tool predicts different working conditions without the need of ad-hoc calibration procedures. It consists in a nonlinear Model Order Reduction Technique based on the Implicit Static Condensation that allows to condense the high fidelity FEM models into few degrees of freedom, thus greatly speeding-up the solution phase and improving the design process of MEMS devices. In particular, the 1:2 internal resonance experienced in a MEMS gyroscope test-structure fabricated with a commercial process is numerically investigated and an excellent agreement with experiments is found. |
format | Online Article Text |
id | pubmed-8361070 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-83610702021-08-17 Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance Gobat, Giorgio Zega, Valentina Fedeli, Patrick Guerinoni, Luca Touzé, Cyril Frangi, Attilio Sci Rep Article Micro-Electro-Mechanical Systems revolutionized the consumer market for their small dimensions, high performances and low costs. In recent years, the evolution of the Internet of Things is posing new challenges to MEMS designers that have to deal with complex multiphysics systems experiencing highly nonlinear dynamic responses. To be able to simulate a priori and in real-time the behavior of such systems it is thus becoming mandatory to understand the sources of nonlinearities and avoid them when harmful or exploit them for the design of innovative devices. In this work, we present the first numerical tool able to estimate a priori and in real-time the complex nonlinear responses of MEMS devices without resorting to simplified theories. Moreover, the proposed tool predicts different working conditions without the need of ad-hoc calibration procedures. It consists in a nonlinear Model Order Reduction Technique based on the Implicit Static Condensation that allows to condense the high fidelity FEM models into few degrees of freedom, thus greatly speeding-up the solution phase and improving the design process of MEMS devices. In particular, the 1:2 internal resonance experienced in a MEMS gyroscope test-structure fabricated with a commercial process is numerically investigated and an excellent agreement with experiments is found. Nature Publishing Group UK 2021-08-12 /pmc/articles/PMC8361070/ /pubmed/34385510 http://dx.doi.org/10.1038/s41598-021-95793-y Text en © The Author(s) 2021 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) . |
spellingShingle | Article Gobat, Giorgio Zega, Valentina Fedeli, Patrick Guerinoni, Luca Touzé, Cyril Frangi, Attilio Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance |
title | Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance |
title_full | Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance |
title_fullStr | Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance |
title_full_unstemmed | Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance |
title_short | Reduced order modelling and experimental validation of a MEMS gyroscope test-structure exhibiting 1:2 internal resonance |
title_sort | reduced order modelling and experimental validation of a mems gyroscope test-structure exhibiting 1:2 internal resonance |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8361070/ https://www.ncbi.nlm.nih.gov/pubmed/34385510 http://dx.doi.org/10.1038/s41598-021-95793-y |
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