Highly Conductive Nanocrystalline Diamond Films and Electronic Metallization Scheme

By using a methane and hydrogen process gas mixture in an appropriate hot-filament CVD process without further dopant, high electrical conductivity of over 100 S/cm has been achieved in nanocrystalline diamond films deposited on silicon single-crystalline substrates. Furthermore, it was found that a...

Descripción completa

Detalles Bibliográficos
Autores principales: Chen, Xin, Mohr, Markus, Brühne, Kai, Fecht, Hans-Jörg
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8397964/
https://www.ncbi.nlm.nih.gov/pubmed/34443008
http://dx.doi.org/10.3390/ma14164484

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8397964/
https://www.ncbi.nlm.nih.gov/pubmed/34443008
http://dx.doi.org/10.3390/ma14164484

Ejemplares similares