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Highly Conductive Nanocrystalline Diamond Films and Electronic Metallization Scheme
By using a methane and hydrogen process gas mixture in an appropriate hot-filament CVD process without further dopant, high electrical conductivity of over 100 S/cm has been achieved in nanocrystalline diamond films deposited on silicon single-crystalline substrates. Furthermore, it was found that a...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8397964/ https://www.ncbi.nlm.nih.gov/pubmed/34443008 http://dx.doi.org/10.3390/ma14164484 |