Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication

The fast and precise fabrication of micro-devices based on single flakes of novel 2D materials and stacked heterostructures is vital for exploration of novel functionalities. In this paper, we demonstrate a fast high-resolution contact mask lithography through a simple upgrade of metallographic opti...

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Detalles Bibliográficos
Autores principales: Pugachev, Mikhail V., Duleba, Aliaksandr I., Galiullin, Arslan A., Kuntsevich, Aleksandr Y.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8397995/
https://www.ncbi.nlm.nih.gov/pubmed/34442473
http://dx.doi.org/10.3390/mi12080850

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8397995/
https://www.ncbi.nlm.nih.gov/pubmed/34442473
http://dx.doi.org/10.3390/mi12080850

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