Cargando…
Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication
The fast and precise fabrication of micro-devices based on single flakes of novel 2D materials and stacked heterostructures is vital for exploration of novel functionalities. In this paper, we demonstrate a fast high-resolution contact mask lithography through a simple upgrade of metallographic opti...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8397995/ https://www.ncbi.nlm.nih.gov/pubmed/34442473 http://dx.doi.org/10.3390/mi12080850 |