Research on Decomposition of Offset in MEMS Capacitive Accelerometer

In a MEMS capacitive accelerometer, there is an offset due to mechanical and electrical factors, and the offset would deteriorate the performance of the accelerometer. Reducing the offset from mechanism would benefit the improvement in performance. Yet, the compositions of the offset are complex and...

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Detalles Bibliográficos
Autores principales: Dong, Xianshan, Huang, Yun, Lai, Ping, Huang, Qinwen, Su, Wei, Li, Shiyuan, Xu, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8398251/
https://www.ncbi.nlm.nih.gov/pubmed/34442622
http://dx.doi.org/10.3390/mi12081000

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8398251/
https://www.ncbi.nlm.nih.gov/pubmed/34442622
http://dx.doi.org/10.3390/mi12081000

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