An Ensembled Anomaly Detector for Wafer Fault Detection

The production process of a wafer in the semiconductor industry consists of several phases such as a diffusion and associated defectivity test, parametric test, electrical wafer sort test, assembly and associated defectivity tests, final test, and burn-in. Among these, the fault detection phase is c...

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Detalles Bibliográficos
Autores principales: Furnari, Giuseppe, Vattiato, Francesco, Allegra, Dario, Milotta, Filippo Luigi Maria, Orofino, Alessandro, Rizzo, Rosetta, De Palo, Rosaria Angela, Stanco, Filippo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8398345/
https://www.ncbi.nlm.nih.gov/pubmed/34450906
http://dx.doi.org/10.3390/s21165465

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8398345/
https://www.ncbi.nlm.nih.gov/pubmed/34450906
http://dx.doi.org/10.3390/s21165465

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