In-Sn-Zn Oxide Nanocomposite Films with Enhanced Electrical Properties Deposited by High-Power Impulse Magnetron Sputtering

In-Sn-Zn oxide (ITZO) nanocomposite films have been investigated extensively as a potential material in thin-film transistors due to their good electrical properties. In this work, ITZO thin films were deposited on glass substrates by high-power impulse magnetron sputtering (HiPIMS) at room temperat...

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Detalles Bibliográficos
Autores principales: Sun, Hui, Li, Zhi-Yue, Chen, Sheng-Chi, Liao, Ming-Han, Gong, Jian-Hong, Bai, Zhamatuofu, Wang, Wan-Xia
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8398350/
https://www.ncbi.nlm.nih.gov/pubmed/34443847
http://dx.doi.org/10.3390/nano11082016

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8398350/
https://www.ncbi.nlm.nih.gov/pubmed/34443847
http://dx.doi.org/10.3390/nano11082016

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