Cargando…

In-Sn-Zn Oxide Nanocomposite Films with Enhanced Electrical Properties Deposited by High-Power Impulse Magnetron Sputtering

In-Sn-Zn oxide (ITZO) nanocomposite films have been investigated extensively as a potential material in thin-film transistors due to their good electrical properties. In this work, ITZO thin films were deposited on glass substrates by high-power impulse magnetron sputtering (HiPIMS) at room temperat...

Descripción completa

Detalles Bibliográficos
Autores principales:	Sun, Hui, Li, Zhi-Yue, Chen, Sheng-Chi, Liao, Ming-Han, Gong, Jian-Hong, Bai, Zhamatuofu, Wang, Wan-Xia
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8398350/ https://www.ncbi.nlm.nih.gov/pubmed/34443847 http://dx.doi.org/10.3390/nano11082016

Ejemplares similares

Enhanced Electrical Properties of Copper Nitride Films Deposited via High Power Impulse Magnetron Sputtering
por: Chen, Yin-Hung, et al.
Publicado: (2022)

Nanoarchitectonics for Ultrathin Gold Films Deposited on Collagen Fabric by High-Power Impulse Magnetron Sputtering
por: Huang, Sheng-Yang, et al.
Publicado: (2022)

Oblique angle deposition of nickel thin films by high-power impulse magnetron sputtering
por: Hajihoseini, Hamidreza, et al.
Publicado: (2019)

Comparison of CrN Coatings Prepared Using High-Power Impulse Magnetron Sputtering and Direct Current Magnetron Sputtering
por: Bai, Heda, et al.
Publicado: (2023)

Enhanced radio-frequency performance of niobium films on copper substrates deposited by high power impulse magnetron sputtering
por: Arzeo, M, et al.
Publicado: (2022)

Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering
por: Mazur, Michał, et al.
Publicado: (2022)

Structural and optical properties of ZnS thin films deposited by RF magnetron sputtering
por: Hwang, Dong Hyun, et al.
Publicado: (2012)

Microstructure and Antimicrobial Properties of Zr-Cu-Ti Thin-Film Metallic Glass Deposited Using High-Power Impulse Magnetron Sputtering
por: Tang, Jian-Fu, et al.
Publicado: (2022)

Synthesis and Characterisation of Nanocomposite Mo-Fe-B Thin Films Deposited by Magnetron Sputtering
por: Malinovskis, Paulius, et al.
Publicado: (2021)

High Power Impulse Magnetron Sputtering of In(2)O(3)/Sn Cold Sprayed Composite Target
por: Winnicki, Marcin, et al.
Publicado: (2021)

Synthesis and Characterization of Cu(2)ZnSnS(4) Thin Films Obtained by Combined Magnetron Sputtering and Pulsed Laser Deposition
por: Zaki, Mohamed-Yassine, et al.
Publicado: (2021)

High power impulse magnetron sputtering: fundamentals, technologies, challenges and applications
por: Lundin, Daniel, et al.
Publicado: (2019)

Improved film density for coatings at grazing angle of incidence in high power impulse magnetron sputtering with positive pulse
por: Avino, F, et al.
Publicado: (2020)

Microstructure and Oxidation Behavior of Metal V Films Deposited by Magnetron Sputtering
por: Zhang, Song, et al.
Publicado: (2019)

Review on Hydrophobic Thin Films Prepared Using Magnetron Sputtering Deposition
por: Ju, Yuxin, et al.
Publicado: (2023)

Mechanical and Thermal Properties of W-Ta-B Coatings Deposited by High-Power Impulse Magnetron Sputtering (HiPIMS)
por: Psiuk, Rafał, et al.
Publicado: (2023)

TiN Films Deposited on Uranium by High Power Pulsed Magnetron Sputtering under Low Temperature
por: Ding, Jingjing, et al.
Publicado: (2018)

Stoichiometry Dependence of Physical and Electrochemical Properties of the SnO(x) Film Anodes Deposited by Pulse DC Magnetron Sputtering
por: Ma, Yibo, et al.
Publicado: (2021)

A Two-Step Magnetron Sputtering Approach for the Synthesis of Cu(2)ZnSnS(4) Films from Cu(2)SnS(3)\ZnS Stacks
por: Zaki, Mohamed Yassine, et al.
Publicado: (2022)

Mechanical and Tribological Properties of Ta-N and Ta-Al-N Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering
por: Zin, Valentina, et al.
Publicado: (2022)

Low-Power Magnetron Sputtering Deposition of Antimonene Nanofilms for Water Splitting Reaction
por: Wang, Xingli, et al.
Publicado: (2022)

Development of a High-Resolution Acoustic Sensor Based on ZnO Film Deposited by the RF Magnetron Sputtering Method
por: Kang, Dong-Chan, et al.
Publicado: (2021)

Low Surface Roughness Graphene Oxide Film Reduced with Aluminum Film Deposited by Magnetron Sputtering
por: Fan, Xiaowei, et al.
Publicado: (2021)

Electrical Properties of Aluminum Nitride Thick Films Magnetron Sputtered on Aluminum Substrates
por: Desideri, Daniele, et al.
Publicado: (2022)

UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film
por: Huang, Jinyu, et al.
Publicado: (2017)

Charge Transfer in Patterned Bilayer Film of Ag/ZnS Composite by Magnetron Control Sputtering
por: Zhang, Yongjun, et al.
Publicado: (2022)

Optically Active TiO(2):Er Thin Films Deposited by Magnetron Sputtering
por: Kot, Anna, et al.
Publicado: (2021)

RF Magnetron Sputtering of Substituted Hydroxyapatite for Deposition of Biocoatings
por: Prosolov, Konstantin A., et al.
Publicado: (2022)

Anisotropic Ti(x)Sn(1-)(x)O(2 )nanostructures prepared by magnetron sputter deposition
por: Chen, Shutian, et al.
Publicado: (2011)

Niobium thin film thickness profile tailoring on complex shape substrates using unbalanced biased High Power Impulse Magnetron Sputtering
por: Rosaz, Guillaume, et al.
Publicado: (2022)

Tuning Stoichiometry and Structure of Pd-WO(3−x) Thin Films for Hydrogen Gas Sensing by High-Power Impulse Magnetron Sputtering
por: Kumar, Nirmal, et al.
Publicado: (2020)

Silver Nanoparticles for Fluorescent Nanocomposites by High-Pressure Magnetron Sputtering
por: Zikmund, Tomáš, et al.
Publicado: (2023)

Fabrication of black aluminium thin films by magnetron sputtering
por: More-Chevalier, J., et al.
Publicado: (2020)

Resistive Switching Characteristics of Li-Doped ZnO Thin Films Based on Magnetron Sputtering
por: Zhao, Xiaofeng, et al.
Publicado: (2019)

Surface properties and biocompatibility of nanostructured TiO(2) film deposited by RF magnetron sputtering
por: Majeed, Asif, et al.
Publicado: (2015)

MoO(x) thin films deposited by magnetron sputtering as an anode for aqueous micro-supercapacitors
por: Liu, Can, et al.
Publicado: (2013)

Nanostructure and Optical Property Investigations of SrTiO(3) Films Deposited by Magnetron Sputtering
por: Xu, Da, et al.
Publicado: (2019)

Deposition of Visible Light Active Photocatalytic Bismuth Molybdate Thin Films by Reactive Magnetron Sputtering
por: Ratova, Marina, et al.
Publicado: (2016)

Biocompatibility and Surface Properties of TiO(2) Thin Films Deposited by DC Magnetron Sputtering
por: López-Huerta, Francisco, et al.
Publicado: (2014)

Combined magnetron sputtering and pulsed laser deposition of TiO(2) and BFCO thin films
por: Benetti, D., et al.
Publicado: (2017)

Cannot write session to /tmp/vufind_sessions/sess_vht43qn38gam7hp55qt37bahsb